Development of XY scanner with minimized coupling motions for high-speed atomic force microscope

作     者：PARK Jong-kyu MOON Won-kyu 

作者机构：Department of Mechanical EngineeringChangwon National University Department of Mechanical EngineeringPohang Univer sity of Science and Technology 

基　　金：Work(R0A-2007-000-20042-0) partly supported by the Second Stage of Brain Korea 21 Projects partly by the Korea Science and Engineering Foundation (KOSEF) through the National Research Laboratory Program funded by the Ministry of Science and Technology of Korea 

出 版 物：《Journal of Central South University》 (中南大学学报（英文版）)

年 卷 期：2011年第18卷第3期

页      码：697-703页

摘      要：The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.

主 题 词：atomic force microscope scanner piezoelectric stack actuator crosstalk flexure hinge 

学科分类：08[工学] 0803[工学-仪器类] 

核心收录：

D　O　I：10.1007/s11771-011-0750-2

馆 藏 号：203104155...