Investigation on graphene growth by roll-to-roll chemical vapor deposition

作     者：Minghao Liang Ling-Xuan Qian Yuting Hou Jun Li Changqing Shen Fangzhu Qing Xuesong Li 梁明昊;钱凌轩;侯雨婷;李俊;沈长青;青芳竹;李雪松

作者机构：State Key Laboratory of Electronic Thin Films and Integrated DevicesUniversity of Electronic Science and Technology of ChinaChengdu610054China School of Electronic Science and EngineeringUniversity of Electronic Science and Technology of ChinaChengdu610054China Shenzhen Institute for Advanced StudyUniversity of Electronic Science and Technology of ChinaShenzhen518110China 

基　　金：supported by the National Natural Science Foundation of China(51772043,51802036) Shenzhen Science and Technology Program((2021)105) 

出 版 物：《Science China Materials》 (中国科学（材料科学（英文版）)

年 卷 期：2022年第65卷第4期

页      码：1042-1048页

摘      要：Both batch-to-batch(B2 B)and roll-to-roll(R2 R)processes can be used for mass production of graphene *** of the simplicity of equipment,the B2 B process is more commonly used in laboratory *** contrast,the R2 R process is more industrially preferred because it is easier to automate and more compatible with the subsequent transfer *** to now,the research on R2 R process has mainly focused on the design of the reactor or the loading configuration,but the in-depth understanding on the growth kinetics is *** this paper,we investigated the evolution of graphene growth and revealed that the graphene domain density grown by the R2 R process was larger than that by the B2 B process with the same reaction parameters,which was attributed to different reaction profiles between the two ***,the defective graphene could be healed with elongated reaction *** the optimized R2 R process,graphene films with quality comparable to those grown by conventional B2 B process could be *** research will promote the development of the mass-production technique for graphene films.

主 题 词：graphene chemical vapor deposition roll to roll kinetics 

学科分类：081702[081702] 07[理学] 08[工学] 0817[工学-轻工类] 070205[070205] 080501[080501] 0805[工学-能源动力学] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1007/s40843-021-1822-3

馆 藏 号：203106327...