Design and fabrication of soft X-ray multilayer for broadband reflection

作     者：Zhanshan Wang Changjun Ke Yueying Ma Tieqiang Zhang Jianlin Cao Xingdan Chen 

作者机构：Chinese Acad Sci State Key Lab Appl Opt Changchun Inst Opt & Fine Mech Changchun 130022 Peoples R China Jilin Univ Technol Dept Appl Phys Changchun 130025 Peoples R China 

基　　金：Sational Natural Science Foundation of China for General Scientific Research  (697'78026) 

出 版 物：《Chinese Science Bulletin》 (中国科学通报)

年 卷 期：1999年第44卷第21期

页      码：1953-1956页

摘      要：A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18-20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in integrated reflectance is obtained. The ensemble calculation is presented at the same time, and the multilayer is fabricated by magnetron sputtering.

主 题 词：soft X-ray multilayer random number magnetron sputtering reflectance. 

学科分类：070207[070207] 07[理学] 08[工学] 0803[工学-仪器类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1007/BF02887116

馆 藏 号：203111738...