Improved uniformity of deposited metallic layer on hybrid micro/nano-structured Si substrates fabricated by two-step laser ablation for SERS application

作     者：LI Long-fan ZHOU Rui CUI Jing-qin YAN Huang-ping WANG Zhen-zhong 李龙凡;周锐;崔景芹;颜黄苹;王振忠

作者机构：School of Aerospace EngineeringXiamen UniversityXiamen 361005China Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province(IKKEM)Xiamen 361005China Pen-Tung Sah Institute of Micro-Nano Science and TechnologyXiamen UniversityXiamen 361005China 

基　　金：Project(2020H0006) supported by the Fujian Provincial Science and Technology Programme China Project(62175203) supported by the National Natural Science Foundation of China Project(RD2020050301) supported by the Innovation Laboratory for Science and Technology of Energy Materials of Fujian Province Applied Research Project China 

出 版 物：《Journal of Central South University》 (中南大学学报（英文版）)

年 卷 期：2022年第29卷第10期

页      码：3312-3322页

摘      要：Surface-enhanced Raman scattering(SERS) has been widely used as an effective technique for lowconcentration molecules detections in the past decades. This work proposes a rapid and accessible process to fabricate SERS-active substrates with high uniformity and controllability based on two-step laser ablation. Laser beams directly ablate the surface of Si, concurrently creating microstructures and ejecting molten materials caused by the thermal effect that nucleate in ambient air. The nuclei grow into nanoparticles and deposit over the surface. These nanoparticles,together with microstructures, improve the light collection efficiency of the SERS-active substrates. Especially after Au thin film deposition, these nanoparticles can provide nanogaps as hotspots for SERS. By orthogonal experiment design,laser processing parameters for better performances are determined. Compared with substrates fabricated by single 1064 nm master oscillator power amplifier(MOPA) laser ablation, substrates ablated by the primary 1064 nm MOPA laser and secondary UV pulsed laser show more uniform nanoparticles’ deposition over the surface. The optimized largearea substrate has a SERS detection limit of 10^(-8)mol/L for 4-aminothiophenol(4-ATP), indicating the potential realworld applications for trace detection.

主 题 词：laser ablation surface-enhanced Raman scattering(SERS) light trapping effect orthogonal experiment design 

学科分类：080901[080901] 081704[081704] 0809[工学-计算机类] 07[理学] 08[工学] 070302[070302] 0817[工学-轻工类] 080401[080401] 0804[工学-材料学] 0805[工学-能源动力学] 080502[080502] 0703[理学-化学类] 0803[工学-仪器类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1007/s11771-022-5154-y

馆 藏 号：203115478...