Design and Dynamic Modeling of a 2-DOF Decoupled Flexure-Based Mechanism

作     者：QIN Yanding TIAN Yanling ZHANG Dawei 

作者机构：School of Mechanical Engineering Tianjin University Tianjin 300072 China 

基　　金：supported by National Natural Science Foundation of China (Grant No. 51175372) National Key Special Project of Science and Technology of China (Grant No. 2011ZX04016-011) 

出 版 物：《Chinese Journal of Mechanical Engineering》 (中国机械工程学报（英文版）)

年 卷 期：2012年第25卷第4期

页      码：688-696页

摘      要：Flexure mechanisms with decoupled characteristics have been widely utilized in precision positioning ***,these mechanisms suffer from either slow response or low load ***,asymmetric design always leads to thermal *** order to solve these issues,a novel 2-DOF decoupled mechanism is developed by monolithically manufacturing sets of statically indeterminate symmetric（SIS） flexure structures in *** design helps to eliminate the thermal error and Finite Element Analysis（FEA） results show that the maximum coupling ratio between X and Y axes is below 0.25% when a maximum pretension force of 200 N is *** ignoring the mass effect,all the SIS flexure structures are simplified to ＂spring-damper＂ components,from which the static and dynamics model are *** relation between the first resonant frequency of the mechanism and the load is investigated by incorporating the load mass into the proposed dynamics *** results show that even with a load of 0.5 kg,the first resonant frequency is still higher than 300 Hz,indicating a high load *** mechanism＇s static and dynamic performances are experimentally *** linear stiffnesses of the mechanism at the working platform and at the driving point are measured to be 3.563 0 N·μm-1 and 3.362 1 N·μm-1,*** corresponding estimation values from analytical models are 3.405 7 N·μm-1 and 3.381 7 N·μm-1,which correspond to estimation errors of-4.41% and 0.6%,*** an additional load of 0.16 kg,the measured and estimated first resonant frequencies are 362 Hz and 365 Hz,*** estimation error is only 0.55%.The analytical and experimental results show that the developed mechanism has good performances in both decoupling ability and load capability;its static and dynamic performance can be precisely estimated from corresponding analytical *** proposed mechanism has wide potentials in precision positioning applic

主 题 词：precision positioning flexure hinge dynamics decoupled structure 

学科分类：12[管理学] 1201[管理学-管理科学与工程类] 08[工学] 0835[0835] 0802[工学-机械学] 080201[080201] 

核心收录：

D　O　I：10.3901/CJME.2012.04.688

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