Effect of substrate temperature and oxygen plasma treatment on the properties of magnetron-sputtered CdS for solar cell applications

作     者：Runxuan Zang Haolin Wang Xiaoqi Peng Ke Li Yuehao Gu Yizhe Dong Zhihao Yan Zhiyuan Cai Huihui Gao Shuwei Sheng Rongfeng Tang Tao Chen 臧润宣;王颢霖;彭小琪;李科;顾月皓;董熠哲;严志昊;蔡志远;高徽徽;盛淑伟;唐荣风;陈涛

作者机构：Department of Materials Science and EngineeringSchool of Chemistry and Materials ScienceUniversity of Science and Technology of ChinaHefei 230026China 

基　　金：supported by the National Natural Science Foundation of China(22275180) the National Key Research and Development Program of China(2019YFA0405600) the Collaborative Innovation Program of Hefei Science Center,CAS,and the University Synergy Innovation Program of Anhui Province(GXXT-2023-031) 

出 版 物：《中国科学技术大学学报》 (JUSTC)

年 卷 期：2024年第54卷第6期

页      码：22-33,I0010页

摘      要：Cadmium sulfide(CdS)is an n-type semiconductor with excellent electrical conductivity that is widely used as an electron transport material(ETM)in solar *** present,numerous methods for preparing CdS thin films have emerged,among which magnetron sputtering(MS)is one of the most commonly used vacuum *** this type of technique,the substrate temperature is one of the key deposition parameters that affects the interfacial properties between the target film and substrate,determining the specific growth habits of the ***,the effect of substrate temperature on the microstructure and electrical properties of magnetron-sputtered CdS(MS-CdS)films was studied and applied for the first time in hydrothermally deposited antimony selenosulfide(Sb_(2)(S,Se)_(3))solar *** the substrate temperature not only results in the design of the flat and dense film with enhanced crystallinity but also leads to the formation of an energy level arrangement with a Sb_(2)(S,Se)_(3)layer that is more favorable for electron *** addition,we developed an oxygen plasma treatment for CdS,reducing the parasitic absorption of the device and resulting in an increase in the short-circuit current density of the solar *** study demonstrates the feasibility of MS-CdS in the fabrication of hydrothermal Sb_(2)(S,Se)_(3)solar cells and provides interface optimization strategies to improve device performance.

主 题 词：magnetron sputtering CdS substrate heating plasma treatment Sb_(2)(S,Se)_(3) thin film solar cell 

学科分类：07[理学] 070205[070205] 08[工学] 080501[080501] 080502[080502] 0805[工学-能源动力学] 0702[理学-物理学类] 

D　O　I：10.52396/JUSTC-2024-0048

馆 藏 号：203128565...