Optical readout uncooled infrared imaging detector using knife-edge filter operation

作     者：ZHANG Q MIAO Z GUO Z DONG F XIONG Z WU X CHEN D LI C JIAO B 

作者机构：Key Laboratory of Mechanical Behavior and Design of Materials University of Science and Technology of China Hefei 230027 China Institute of Microelectronics Chinese Academy of Science Beijing 100029 China 

基　　金：This work is supported by National Natural Science Foundationof China (Grant No. 10232030,50076040,10472111) NationalBasic Research Program of China (2006CB300404) 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2007年第3卷第2期

页      码：119-122页

摘      要：An optical readout uncooled infrared （IR） imaging detector of bimaterial cantilever array using knife-edge filter operation （KEFO） is demonstrated. The angle change of each cantilever in a focal plane array （FPA） can be simultaneously detected with a resolution of 10.5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metaUized legs is specially designed and modeled. A FPA with 160×160 pixels is fabricated and thermal images with noise equivalent temperature difference （NETD） of 400 mK are obtained by this imaging detector.

主 题 词：光学读出 非制冷红外成象探测器 刀口滤波器运算 设计 模型 

学科分类：080901[080901] 070207[070207] 0809[工学-计算机类] 07[理学] 08[工学] 080401[080401] 0804[工学-材料学] 0803[工学-仪器类] 0702[理学-物理学类] 

D　O　I：10.1007/s11801-007-7014-2

馆 藏 号：203128570...