Design of a long range nano-scale resolution mechanism

作     者：Shuo Hung CHANG Jen Bon LEE 

作者机构：Department of Mechanical EngineeringNational Taiwan University 

基　　金：supported by the National Science Council (No.NSC-96-2628-E002-199) 

出 版 物：《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 (浙江大学学报（英文版）A辑（应用物理与工程）)

年 卷 期：2010年第11卷第4期

页      码：250-254页

摘      要：This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high *** fine stage is arranged in series with a coarse *** key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and *** designed the toggle mechanism for reduction of the displacement to suppress signal *** performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor,*** measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.

主 题 词：Coarse-fine dual stage Nano-scale resolution Piezoelectric (PZT) actuator 

学科分类：07[理学] 070205[070205] 08[工学] 080501[080501] 0805[工学-能源动力学] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1631/jzus.A1000029

馆 藏 号：203133357...