Design and test of a capacitance detection circuit based on a transimpedance amplifier

作     者：穆林枫 张文栋 何常德 张睿 宋金龙 薛晨阳 

作者机构：Key Laboratory of Instrumentation Science & Dynamic MeasurementMinistry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & MeasurementNorth University of China 

基　　金：Project supported by the National Natural Science Foundation of China(No.61127008) the Subsidized Program of the National High Technology Research and Development Program of China(No.2011AA040404) 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2015年第36卷第7期

页      码：140-147页

摘      要：This paper presents a transimpedance amplifier （TIA） capacitance detection circuit aimed at detecting micro-capacitance, which is caused by ultrasonic stimulation applied to the capacitive micro-machined ultrasonic transducer （CMUT）. In the capacitance interface, a TIA is adopted to amplify the received signal with a center frequency of 400 kHz, and finally detect ultrasound pressure. The circuit has a strong anti-stray property and this paper also studies the calculation of compensation capacity in detail. To ensure high resolution, noise analysis is conducted. After optimization, the detected minimum ultrasound pressure is 2.1 Pa, which is two orders of magni- tude higher than the former. The test results showed that the circuit was sensitive to changes in ultrasound pressure and the distance between the CMUT and stumbling block, which also successfully demonstrates the functionality of the developed TIA of the analog-front-end receiver.

主 题 词：TIA capacitance detection CMUT high resolution distance test 

学科分类：0808[工学-自动化类] 080802[080802] 0809[工学-计算机类] 080902[080902] 08[工学] 0805[工学-能源动力学] 0703[理学-化学类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1088/1674-4926/36/7/075007

馆 藏 号：203135938...