Design and fabrication of superconducting transition edge sensor bolometers with background limited noise performance

作     者：Qingya Zhang Jianshe Liu Wenhui Dong Tianshun Wang Genfang He Tiefu Li Xingxiang Zhou Wei Chen 

作者机构：Tsinghua National Laboratory for Information Science and Technology Tsinghua University Institute of Microelectronics Department of Micro/ Nanoelectronics Tsinghua University Department of Optics and Optical Engineering University of Science and Technology of China CAS Key Laboratory of Quantum Information University of Science and Technology of China 

基　　金：supported by the National Basic Research Program of China (2011CBA00304) Tsinghua University Initiative Scientific Research Program (20131089314) the National Natural Science Foundation of China (60836001 and 11273023) 

出 版 物：《Chinese Science Bulletin》 (科学通报(英文版))

年 卷 期：2014年第59卷第19期

页      码：2292-2297页

摘      要：We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive *** reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different *** measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 *** detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.

主 题 词：测辐射热计 噪声性能 超导转变 制造 设计 传感器 饱和功率 检测器具 

学科分类：080202[080202] 08[工学] 080401[080401] 0804[工学-材料学] 0802[工学-机械学] 081102[081102] 0811[工学-水利类] 

核心收录：

D　O　I：10.1007/s11434-014-0338-y

馆 藏 号：203138110...