Design and Fabrication of Polarization-Independent Micro-Ring Resonators

作     者：耿敏明 贾连希 张磊 刘育梁 杨林 李芳 

作者机构：Laboratory on Optoelectronic Systems Institute of Semiconductors Chinese Academy of Sciences PO Box 912 Beijing 100083 

基　　金：Supported by the National Natural Science Foundation of China under Grant No 90604001 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：2008年第25卷第4期

页      码：1333-1335页

摘      要：Origin of polarization sensitivity of photonic wire waveguides （PWWs） is analysed and the effective refractive indices of two different polarization states are calculated by the three-dimensional full-vector beam propagation method. We find that PWWs are polarization insensitive if the distribution of its refractive index is uniform and the cross section is square. An MRR based on such a polarization-insensitive PWW is fabricated on an 8-inch silicon-on-insulator wafer using 248-nm deep ultraviolet lithography and reactive ion etching. The quasi-TE mode is resonant at 1542.25nm and 1558.90nm, and the quasi-TM mode is resonant at 1542.12nm and 1558.94nm. The corresponding polarization shift is 0. 13 nm at the shorter wavelength and 0.04 nm at the longer wavelength. Thus the fabricated device is polarization independent. The extinction ratio is larger than 10dB. The 3dB bandwidth is about *** and the Qvalue is about 620 at 1558.90nm.

主 题 词：supernova explosion proto-neutron star shock wave 

学科分类：080904[080904] 0809[工学-计算机类] 08[工学] 0805[工学-能源动力学] 0704[理学-天文学类] 

核心收录：

D　O　I：10.1088/0256-307X/25/4/046

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