Design and Characterization of a Top Cladding for Silicon-on-Insulator Grating Coupler

作     者：肖希 杨彪 储涛 余金中 俞育德 Nemkova Anastasia;XIAO Xi;YANG Biao;CHU Tao;YU Jin-Zhong;YU Yu-De

作者机构：State Key Laboratory on Integrated OptoelectronicsInstitute of SemiconductorsChinese Academy of SciencesBeijing 100083 

基　　金：Supported by the National Basic Research Program of China under Grant No 2011CB301701 the National Natural Science Foundation of China under Grant Nos 60877036,61107048 Chinese Academy of Sciences for a fellowship for young international scientists(No 2011Y1GB07) China Postdoctoral Science Foundation(No 2011M500372) 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：2012年第29卷第11期

页      码：105-107页

摘      要：An effective top cladding for silicon-on-insulator grating coupler is designed and the validity of the design is confirmed *** proposed double-layer silicon oxide/silicon nitride(SiO_(2)/Si_(3)N_(4))cladding demonstrates antireflection properties and affects a coupling strength of the grating structure.A coupling efficiency of 65%is obtained after cladding layer deposition.

主 题 词：cladding coupling fir 

学科分类：080901[080901] 0809[工学-计算机类] 08[工学] 080401[080401] 0804[工学-材料学] 0805[工学-能源动力学] 0704[理学-天文学类] 0803[工学-仪器类] 

核心收录：

D　O　I：10.1088/0256-307X/29/11/114213

馆 藏 号：203173246...