An SPM stage driven by three stepper motors

作     者：BAI Jiang-hua 白江华;Andres La Rosa

作者机构：Physics Departm ent Portland State University Oregon 97201 USA 

出 版 物：《Journal of Measurement Science and Instrumentation》 (测试科学与仪器（英文版）)

年 卷 期：2017年第8卷第3期

页      码：271-276页

摘      要：A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more *** this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the ***,the stage is fully tested and has a700nm resolution in Z motion of the SPM.

主 题 词：scanning probe microscope (SPM) stepper motors radio frequency (RF) control Lab VIEW 

学科分类：08[工学] 0803[工学-仪器类] 

核心收录：

D　O　I：10.3969/j.issn.1674-8042.2017.03.010

馆 藏 号：203276609...