An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides

作     者：方青 贺月娇 辛红丽 李芳 刘育梁 Fang Qing;He Yuejiao;Xin Hongli;Li Fang;Liu Yuliang

作者机构：中国科学研究院半导体研究所北京100083 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2005年第26卷第2期

页      码：276-280页

摘      要：A 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication *** fabricated device exhibits low loss and good coupling *** excess loss is lower than 0 8dB,and the uniformity is 0 45dB at the wavelength of ***,the polarization dependent loss is lower than 0 7dB at *** device size is only 2mm×10mm.

主 题 词：multimode interference power splitter SOI multimode input/output waveguides 

学科分类：070207[070207] 07[理学] 0702[理学-物理学类] 

核心收录：

D　O　I：10.3969/j.issn.1674-4926.2005.02.011

馆 藏 号：203309279...