Optimized design and fabrication of nanosecond response electro optic switch based on ultraviolet-curable polymers

作     者：赵旭亮 岳远斌 刘通 孙健 王希斌 孙小强 陈长鸣 张大明 Zhao Xu-Liang;Yue Yuan-Bin;Liu Tong;Sun Jian;Wang Xi-Bin;Sun Xiao-Qiang;Chen Chang-Ming;Zhang Da-Ming

作者机构：College of Electronic Science and Engineering Jilin University State Key Laboratory on Integrated Optoelectronics Jilin University Jilin Provincial Engineering Laboratory on Polymer Planar Lightwave Circuit 

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.61177027 61107019 61205032 and 61261130586) 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2015年第24卷第4期

页      码：184-192页

摘      要：A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.

主 题 词：electro-optic switch optical transmission loss inverted-rib waveguide poled polymers 

学科分类：070207[070207] 07[理学] 08[工学] 0803[工学-仪器类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1088/1674-1056/24/4/044101

馆 藏 号：203389055...