Design of an ultra-compact 3 dB MMI coupler

作     者：陈媛媛 杨笛 余金中 孙梅 邢素霞 

作者机构：College of Computer and Information EngineeringBeijing University of Technology and Business College of ScienceCentral University for Nationalities State Key Laboratory of Integrated OptoelectronicsInstitute of SemiconductorsChinese Academy of Sciences 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2009年第5卷第6期

页      码：427-429页

摘      要：The design of an ultra-compact SOI-based 1×2 3 dB multimode interference(MMI) coupler is *** symmetric multimode interference structure and deeply-etched parabolically tapered multimode waveguide are used in the *** length of the device is reduced by about 87% compared with general multimode interference straight *** on effective index method(EIM) and two dimensional beam propagation method(2D-BPM),the structure parameters are optimized and the fabrication tolerances are *** results indicate that the performance of the coupler is deeply affected by the coupler s width,etching depth and photolithography alignment error in perpendicular direction.

主 题 词：耦合器 MMI 超小型 分贝 设计 多模波导 多模干涉 结构参数 

学科分类：0808[工学-自动化类] 0809[工学-计算机类] 08[工学] 080203[080203] 0805[工学-能源动力学] 0802[工学-机械学] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1007/s11801-009-9092-9

馆 藏 号：203410355...