Design and fabrication of optical power splitters with large port count

作     者：王亮亮 安俊明 张家顺 吴远大 李建光 王红杰 王玥 潘盼 钟飞 査强 尹小杰 胡雄伟 赵德刚 

作者机构：State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of Sciences Henan Shi Jia Photons Technology Co.Ltd 

基　　金：supported by the National "863"and Development Program of China(Nos.2013AA031402 and 2011AA010303) the National Natural Science Foundation of China(Nos.61090390,61274047,61275029,61205044,and 61307034) the Major Science & Technology Specific Project of Henan Province of China the Independent Innovation Foundation of Henan Province of China 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2014年第12卷第9期

页      码：70-74页

摘      要：We design and fabricate compact, low loss, and high port-count optical power splitters of 1 × 128 and 2 × 128 using silica-based planar lightwave circuit （PLC） technology on 6 inch quartz substrate. PLC technology is mainly based on plasma enhanced chemical vapor deposition, photolithography, and etching. The measured results show that the insertion loss, uniformity, and wavelength-dependent loss of 1 ~ 128 and 2 x 128 optical power splitters are less than 23, 1.43, and 0.92 dB and 23.3, 1.8, and 1.3 dB, respectively, in the wavelength range from 1.26 to 1.65/ma. The polarization-dependent losses are less than 0.16 and 0.2 dB, respectively, in the wavelengths of 1.31, 1.49, and 1.55 l/in.

主 题 词：Photolithography Plasma enhanced chemical vapor deposition Quartz 

学科分类：080903[080903] 0808[工学-自动化类] 0809[工学-计算机类] 08[工学] 0805[工学-能源动力学] 0702[理学-物理学类] 

核心收录：

D　O　I：10.3788/col201412.092302

馆 藏 号：203412672...