Accelerometer Design Using MOS Ring Oscillator

作     者：ZHANG Zhao-hua YUE Rui-feng LIU Li-tian 

作者机构：Institute of MicroelectronicsTsinghua UniversityBeijing 100084China 

基　　金：supported by the Reborn Project of National Education 

出 版 物：《Frontiers of Electrical and Electronic Engineering in China》 (中国电气与电子工程前沿（英文版）)

年 卷 期：2006年第1卷第1期

页      码：77-81页

摘      要：A digital accelerometer is developed by using a ring oscillator(RO)and a *** sensitive unit of the accelerometer is the metal-oxide semiconductor(MOS)ROs located on silicon *** on the piezoresistive effect of the MOS RO,the accelerometer transduces the acceleration into frequency *** syntonic frequency of the MOS RO changes in relation to many environmental elements,such as temperature,source voltage,and so *** mixer is an interior signal processor that improves the output signal characteristics,with the digital output signal representing the frequency *** the accelerometer is based on the piezoresistive effect of the MOS RO,the frequency characteristics of the MOS RO and its relationship with the acceleration are *** device has been fabricated using standard integrated circuits processing methods combined with the Micro-Electro-Mechanical Systems *** characteristics of the sample chip are in agreement with the theoretical *** accelerometer has a high sensitivity of 6.91 kHz/g,a low temperature coefficient,and a simple fabrication process.

主 题 词：digital accelerometer ring oscillator frequency mixer 

学科分类：080902[080902] 0809[工学-计算机类] 08[工学] 

D　O　I：10.1007/s11460-005-0015-7

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