Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy

作     者：周炳海 王翥 陈佳 Zhou Binghai;Wang Zhu;Chen Jia

作者机构：同济大学机械与能源工程学院上海201804 

基　　金：The National Natural Science Foundation of China(No.71071115 61273035) 

出 版 物：《Journal of Southeast University(English Edition)》 (东南大学学报（英文版）)

年 卷 期：2013年第29卷第2期

页      码：187-193页

摘      要：In order to enhance the utilization of single-ann cluster tools and optimize the scheduling problems of dynamic reaching wafers with residency time and continuous reentrancy constraints, a structural heuristic scheduling algorithm is presented. A nonlinear programming scheduling model is built on the basis of bounding the scheduling problem domain. A feasible path search scheduling method of single-arm robotic operations is put forward with the objective of minimal makespan. Finally, simulation experiments are designed to analyze the scheduling algorithms. Results indicate that the proposed algorithm is feasible and valid to solve the scheduling problems of multiple wafer types and single-ann clusters with the conflicts and deadlocks generated by residency time and continuous reentrancy constraints.

主 题 词：cluster tools scheduling residency time continuous reentrancy 

学科分类：081203[081203] 08[工学] 0835[0835] 0812[工学-测绘类] 

核心收录：

D　O　I：10.3969/j.issn.1003-7985.2013.02.014

馆 藏 号：203555741...