DESIGN AND FABRICATION OF A MICRO THERMAL ACTUATOR FOR CELLULAR GRASPING

作     者：陈浩然 李文荣 

作者机构：Centre for Micro and Nano SystemsThe Chinese University of Hong KongShatinN.t.Hong Kong SARChina Centre for Micro and Nano SystemsThe Chinese University of Hong KongShatinN.t.Hong Kong SARChina Shenyang Institute of AutomationChinese Academy of SciencesShenyang 110016China 

基　　金：The project supported by the Hong Kong Research Grants Council (CUHK4215/01) 

出 版 物：《Acta Mechanica Sinica》 (力学学报（英文版）)

年 卷 期：2004年第20卷第2期

页      码：132-139页

摘      要：The development of a novel polymer-based micro robotic gripper that can be actuated in a fluidic medium is presented in this *** current work is to explore new materials and designs for thermal actuators to achieve micromanipulation of live biological *** used parylene C to encapsulate a metal heater,resulting in effectively a tri-layered thermal *** C is a bio-compatible dielectric polymer that can serve as a barrier to various gases and chemicals. Therefore,it is suitable to serve as a thermal/electrical/chemical isolation material for protecting the metal heater from exposing to an aqueous *** have demonstrated parylene actuators (2mm×100μm×0.5μm)to operate in an aqueous environment using 10 to 80mW input *** temperature of these actuators at full deflection was estimated to be～60℃,which is much lower than the typical requirement of>100℃ to actuate other conventional MEMS *** rerio follicles in fluidic medium were captured successfully using these ***,these actuators were found to be responsive to moderate rise in environmental temperature,and hence,we could vary the fluidic medium temperature to actuate trimorphs on a chip without any input of electrical energy, i.e.,raising the fluidic temperature from 23℃ to 60℃ could actuate the trimorphs to grasp follicles of ～1mm size in *** 60℃,the embryos inside the follicles were observed to be alive,i.e.,they were still moving in the biological fluid isolated by the follicle *** smallest follicles grasped were～500μm in diameter using 800μm×130μm×0.6μm *** fabrication process,modeling, and optimization of the trimorph actuators are *** on the successful operation of these polymer-based actuators,we are currently developing multifinger thermal microgrippers for cellular grasping and manipulation,which can potentially be hybridly integrated with circuits for computer control.

主 题 词：thermal actuator microgripper cell manipulation underwater microactuator 

学科分类：080202[080202] 08[工学] 080401[080401] 0804[工学-材料学] 080402[080402] 0802[工学-机械学] 

核心收录：

D　O　I：10.1007/BF02484256

馆 藏 号：203570893...