Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology

作     者：杜春晖 何常德 于佳琪 葛晓洋 张永平 张文栋 Du Chunhui;He Changde;Yu Jiaqi;Ge Xiaoyang;Zhang Yongping;Zhang Wendong

作者机构：Key Laboratory of Instrumentation Science&Dynamic MeasurementMinistry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test&MeasurementNorth University of China Key Laboratory of Science and Technology on Electronic Test&Measurement 

基　　金：supported by the International Science & Technology Cooperation Program of China(No.61011140351) the National High Technology Research and Development Program of China(No.2011AA040404) the National Natural Science Foundation of China(No. 51075375) 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2012年第33卷第10期

页      码：48-52页

摘      要：With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil *** with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis *** ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are *** dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.

主 题 词：cross-axis sensitivity piezoresistive symmetric distribution triaxial accelerometer 

学科分类：0808[工学-自动化类] 0809[工学-计算机类] 08[工学] 080401[080401] 0804[工学-材料学] 080402[080402] 0805[工学-能源动力学] 0703[理学-化学类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1088/1674-4926/33/10/104005

馆 藏 号：203709346...