Design and fabrication of a terminating type MEMS microwave power sensor

作     者：许映林 廖小平 

作者机构：Key Laboratory of MEMS of Ministry of Education Southeast University 

基　　金：supported by the National Natural Science Foundation of China (No. 60676043) the National High Technology Research and Development Program of China (No. 2007AA04Z328) 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2009年第30卷第4期

页      码：59-62页

摘      要：A terminating type MEMS microwave power sensor based on the Seebeck effect and compatible with the GaAs MMIC process is presented. An electrothermal model is introduced to simulate the heat transfer behavior and temperature distribution. The sensor measured the microwave power from –20 to 20 dBm up to 20 GHz. The sensitivity of the sensor is 0.27 mV/mW at 20 GHz, and the input return loss is less than –26 dB over the entire experiment frequency range. In order to improve the sensitivity, four different types of coplanar waveguide （CPW） were designed and the sensitivity was significantly increased by about a factor of 2.

主 题 词：MEMS MMIC microwave power return loss sensitivity 

学科分类：080202[080202] 08[工学] 0802[工学-机械学] 

核心收录：

D　O　I：10.1088/1674-4926/30/4/044010

馆 藏 号：203832437...