Design of a Bionic Cilia MEMS three-dimensional vibration sensor

作     者：李振 张国军 薛晨阳 吴淑娟 

作者机构：Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education Science and Technology on Electronic Test & Measurement Laboratory North University of China 

基　　金：supported by the National High Technology Research and Development Program of China(No.2011AA040404) the Young Scientists Fund of the National Natural Science Foundation of China(No.51205374) the Special Funds of the National Natural Science Foundation of China(No.61127008) 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2013年第34卷第11期

页      码：88-94页

摘      要：A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbenchl2.0. The structure was made by MEMS processes including lithography, ion implantation, PECVD, etching, etc. Finally, the sensor is tested by using a TV5220 sensor auto calibration system. The results show that the lowest sensitivity of the sensor is 394.7μV/g and can reach up to 460.2 μV/g, and the dimension coupling is less than 0.6152%, and the working frequency range is 0-1000 Hz.

主 题 词：vibration sensor MEMS, bionic ANSYS 

学科分类：0808[工学-自动化类] 0809[工学-计算机类] 080202[080202] 08[工学] 0805[工学-能源动力学] 080502[080502] 0703[理学-化学类] 0802[工学-机械学] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1088/1674-4926/34/11/114015

馆 藏 号：203858321...