DESIGN AND CONTROL OF AN ULTRAPRECISION STAGE USED IN GRATING TILING

作     者：WANG Yong LIU Zhigang BO Feng ZHU Jianqiang 

作者机构：Shanghai Institule of Optics and Fine MechanicsChinese Acadamy of SciencssShanghai 201800China 

基　　金：This project is supported by Nanotechnology Promotion Center  Science and Technology Commission of Shanghai Municipality  China (No. 0359nm004) 

出 版 物：《Chinese Journal of Mechanical Engineering》 (中国机械工程学报（英文版）)

年 卷 期：2007年第20卷第1期

页      码：1-4页

摘      要：In petawatt laser system, the *** to compose pulse compressor are very large in size which can be only acquired currently by arraying small aperture gratings to form a large one instead, an approach referred to as grating tiling. Theory and experiments have demonstrated that the coherent addition of multiple small gratings to form a larger grating is viable, the key technology of which is to control the relative position and orientation of each grating with high precision. According to the turin factors that affect the performance of the grating tiling, a 5-DOF ultraprecision stage is developed for the grating tiling experiment. The mechanism is formed by serial structures. The motion of the mechanism is guided by flexure hinges and driven by piezoelectric actuators and the movement resolution of which can achieve nanometer level. To keep the stability of the mechanism, capacitive position sensors with nanometer accuracy are fixed on it to provide feedback signlas with which to realize closed-loop control, thus the *** of the mechanism is within several nanometers range through voltage control and digital PID algorithm. Results of experiments indicate that the performance of the mechanism can meet the requirement of precision for grating tiling.

主 题 词：Grating compressor Orating filing Flexure mechanism Piezoelectric actuator 

学科分类：080901[080901] 0809[工学-计算机类] 08[工学] 080401[080401] 0804[工学-材料学] 0803[工学-仪器类] 

核心收录：

D　O　I：10.3901/cjme.2007.01.001

馆 藏 号：203947633...