Design of Microstructure Parameters on a Small Multi-Throttle Aerostatic Guideway in Photolithography

作     者：Zhongpu Wen Jianwei Wu Kunpeng Xing Yin Zhang Jiean Li Jiubin Tan Zhongpu Wen;Jianwei Wu;Kunpeng Xing;Yin Zhang;Jiean Li;Jiubin Tan

作者机构：Center of Ultra-Precision Optoelectronic Instrumentation EngineeringHarbin Institute of TechnologyHarbin 150001China Key Lab of Ultra-Precision Intelligent Instrumentation(Harbin Institute of Technology)Ministry of Industry Information TechnologyHarbin 150080China 

基　　金：This work was funded by the National Natural Science Foundation of China(51675136) the National Science and Technology Major Project(2017ZX02101006-005) the Heilongjiang Natural Science Foundation(E2017032) 

出 版 物：《Engineering》 (工程（英文）)

年 卷 期：2021年第7卷第2期

页      码：226-237页

摘      要：A compact multi-throttle aerostatic guideway is the preferred structure for high precision and acceleration motion in the variable-slit system(VS)of *** presence of microstructure,such as recesses and grooves,on the guideway working surface has been found to improve the loading ***,the effects on the guideway performance of changing the microstructure on the micron level are not yet *** mesh adaptation method,which was proposed by the authors,is employed in this paper to quantitatively study the influences of four microstructure *** effect of tuning these parameters on the loading performance is *** level of impact determines the proposed design process of the *** characteristic feature of the proposed design process is that the working points of carrying capacity,stiffness,and rotational stiffness are unified under twoway adjusting by means of recess *** to the proposed design process and tuning method,the restriction of supply pressure is lifted to a certain extent and the mutual tradeoff among the loading performances is *** experimental results show that the rotational stiffness of the designed guideway,based on the tuned parameters,reached 2.14×10^(4) Nmrad1 and increased by 69.8%.In a scanning test of the applied VS on argon fluoride laser(ArF)photolithography,the average scanning acceleration reached 67.5 m·s^(-2),meeting the design specification.

主 题 词：Photolithography Multi-throttle aerostatic guideway Microstructure Working point Rotational stiffness 

学科分类：08[工学] 080203[080203] 0802[工学-机械学] 

核心收录：

D　O　I：10.1016/j.eng.2019.09.012

馆 藏 号：203981670...