Boosting Cu(In,Ga)Se_(2)Thin Film Growth in Low-Temperature Rapid-Deposition Processes:An Improved Design for the Single-Heating Knudsen Effusion Cell

作     者：Yunxiang Zhang Shuping Lin Shiqing Cheng Zhichao He Zhaojing Hu Zhiqiang Zhou Wei Liu Yun Sun Yunxiang Zhang;Shuping Lin;Shiqing Cheng;Zhichao He;Zhaojing Hu;Zhiqiang Zhou;Wei Liu;Yun Sun

作者机构：Key Laboratory of Photoelectronic Thin Film Devices and Technology of TianjinInstitute of Photoelectronic Thin Film and DevicesCollege of Electronic Information and Optical EngineeringNankai UniversityTianjin 300350China Engineering Center of Thin Film Photoelectronic Technology of Ministry of EducationInstitute of Photoelectronic Thin Film and DevicesCollege of Electronic Information and Optical EngineeringNankai UniversityTianjin 300350China 

基　　金：The work was supported by the National Key R&D Program of China(2018YFB1500200) the National Natural Science Foundation of China(61774089 and 61974076) the Natural Science Foundation of Tianjin(18JCZDJC31200) 

出 版 物：《Engineering》 (工程（英文）)

年 卷 期：2021年第7卷第4期

页      码：534-541页

摘      要：The Knudsen effusion cell is often used to grow high-quality Cu(In,Ga)Se_(2)(CIGS)thin film in coevaporation ***,the traditional single-heating Knudsen effusion cell cannot deliver complete metal selenides during the whole deposition process,particularly for a low-temperature deposition process,which is probably due to the condensation and droplet ejection at the nozzle of the *** this study,thermodynamics analysis is conducted to decipher the reason for this ***,a new single-heating Knudsen effusion is proposed to solve this difficult problem,which leads to an improvement in the quality of CIGS film and a relative increase in conversion efficiency of 29%at a growth rate of about 230 nm
min1,compared with the traditional efficiency in a lowtemperature rapid-deposition process.

主 题 词：Cu(In,Ga)Se_(2) Knudsen effusion cell Condensation Droplet ejection Low temperature 

学科分类：0808[工学-自动化类] 07[理学] 070205[070205] 08[工学] 0810[工学-土木类] 0830[工学-生物工程类] 0817[工学-轻工类] 0807[工学-电子信息类] 080501[080501] 0805[工学-能源动力学] 0703[理学-化学类] 0812[工学-测绘类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1016/j.eng.2020.01.016

馆 藏 号：203990222...