Three-dimensional atomic force microscopy based on tailored cantilever probe with flared tip

作     者：ZHANG Rui WU Sen XIAO Sha-sha HU Xiao-dong SHI Yu-shu FU Xing 张锐;吴森;肖莎莎;胡晓东;施玉书;傅星

作者机构：State Key Laboratory of Precision Measurement Technology and InstrumentsTianjin UniversityTianjin 300072China Nanchang Institute for Microtechnology of Tianjin UniversityTianjin 300072China National Institute of MetrologyBeijing 100029China 

基　　金：National Key Research and Development Pragram of China(No.2016YFF0200602) National Natural Science Foundation of China(No.61973233) 

出 版 物：《Journal of Measurement Science and Instrumentation》 (测试科学与仪器（英文版）)

年 卷 期：2020年第11卷第4期

页      码：388-396页

摘      要：In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of *** eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation *** addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in *** tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning *** results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.

主 题 词：three-dimensional atomic force microscope(3D-AFM) flared tip scanner optical lever vector scanning 

学科分类：08[工学] 080401[080401] 0804[工学-材料学] 081102[081102] 0811[工学-水利类] 

核心收录：

D　O　I：10.3969/j.issn.1674-8042.2020.04.011

馆 藏 号：203990788...