Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

作     者：于佳琪 何常德 宛克敬 廉德钦 薛晨阳 张文栋 

作者机构：Key Laboratory of Instrumentation Science&Dynamic MeasurementMinistry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & MeasurementNorth University of China 

基　　金：Project supported by the National Natural Science Foundation of China(No.61127008) 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2013年第34卷第7期

页      码：116-122页

摘      要：A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the *** the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation *** boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic *** membrane-beam microstructure is fabricated integrally by MEMS manufacturing ***,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated *** sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.

主 题 词：MEMS piezoresistive ultrasonic sensor ANSYS membrane-beams 

学科分类：080805[080805] 0808[工学-自动化类] 0809[工学-计算机类] 080202[080202] 08[工学] 080401[080401] 0804[工学-材料学] 0805[工学-能源动力学] 0703[理学-化学类] 0802[工学-机械学] 0811[工学-水利类] 0702[理学-物理学类] 

核心收录：

D　O　I：10.1088/1674-4926/34/7/074013

馆 藏 号：203996426...