摘要：A 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication *** fabricated device exhibits low loss and good coupling *** excess loss is lower than 0 8dB,and the uniformity is 0 45dB at the wavelength of ***,the polarization dependent loss is lower than 0 7dB at *** device size is only 2mm×10mm.

摘要：研究了基于SOI(silicon on insulator)材料的阵列波导光栅(AWG)分波器件,给出了此器件材料色散的数值拟合公式,进而利用BPM方法研究了材料色散脊型波导结构变化和器件制做中刻蚀深度误差对波导有效折射率和波分复用模块性能的影响。结果表明,刻蚀深度误差对模块性能优劣起关键作用。