摘要：环保料场较传统露天料场在降耗、减排、节能、节省用地、稳定生产等方面有明显的优势,是当前原料场技术发展的必然趋势。但现有环保料场内部空间利用率低,资源浪费严重,工程一次投资高,制约了环保料场的推广与应用。针对现有环保料场内部空间利用率低的问题进行系统描述,运用TRIZ理论分别进行系统功能分析和系统问题分析,求解得到一系列方案,并通过对比确定了最优方案。该方案采用刮板取料机半门型架上跨卸料小车的布置型式,刮板取料机走行梁不再需要单独设置,上部走行机构检修维护更为方便,解决了刮板取料机走行梁限制物料堆高的问题,提高了料场内部空间利用率,增大了料场贮量,降低了土建工程量,经济效益显著。

摘要：喷淋板通常用在化学气相沉积等真空腔室中,其流体动力学特性是决定真空腔室性能的关键因素之一。本文利用自主开发二维直接模拟Monte Carlo模拟程序对单个不同形状喷淋孔结构中性气体流场进行了数值仿真研究;讨论了七种不同单个喷淋孔结构的速度场、压力场和温度场分布情况。中性参考气体为氩气,固定入口压力200 Pa、温度300 K。结果表明,喷淋孔入口或出口形状影响腔室的工艺性能;而将喷淋孔入口和出口均设计成锥形,则腔室内流场分布较为理想。研究成果为喷淋板设计提供直接参考,同时对化工、热处理、光伏电池制造等领域中腔室部件的研发具有重要意义。

摘要：One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma- based and vacuum-based semiconductor processing. The electrostatic chuck plays an important role in adsorbing and cooling/heating wafers, and has technical advantages on non-edge exclusion, high reliability, wafer planarity, particles reduction and so on. This article extracts key design elements from the existing knowledge and techniques of electrostatic chuck by the method proposed by Paul and Beitz, and establishes a design space systematically. The design space is composed of working objects, working principles and working structures. The working objects in- volve electrostatic chuck components and materials, classifications, and relevant properties; the working principles involve clamping force, residual force, and temperature control; the working structures describe how to compose an electrostatic chuck and to fulfill the overall functions. The systematic design space exhibits the main issues during electrostatic chuck design. The design space will facilitate and inspire designers to improve the design quality and shorten the design time in the conceptual design.