摘要：This paper presents a design for a self-powered radio frequency identification (RFID) tag with a thin film bulk acoustic reso- nating piezoelectric power supply (PPS), which can be used for portable remote temperature monitoring. We call this system a PPS-RFID for short. The RFID systems have been found to have many applications in the internet of things (IOT) in the past decade. But semi-active RFID tags require an onboard battery which limits their applications in many fields. For these reasons, our research focuses on power sources for the RFID tags. This paper emphasizes the circuit design and simulation of PPS. In our tests, 0.283 mW was generated by PPS at 1 Hz vibration by a 650 N impact force. The results showed that the integrated PPS could supply sufficient power for the designed PPS-RFID tag. The PPS-RFID tag can be widely used for temperature monitoring during mobile transport of perishable items such as medicines or food.

摘要：基于微机电系统(MEMS)技术的薄膜体声波谐振器(FBAR)在无线通讯领域取得了巨大的成功后,由于其具备厚度薄,体积小,与IC兼容及谐振频率和灵敏度都远高于传统的微质量传感器(如石英晶体微天平)等优势,逐渐在微生物分子检测方面崭露头角。由于微生物分子大都生存于液体环境,而纵波模式下FBAR微质量传感器在液体环境中声波损耗大,其品质因数Q值只有3.53。因此,该文在分析了纵波模式下FBAR微质量传感器在气相和液相环境中的特性后,针对液相环境中传感器Q值较低问题,设计了一种具有微通道的FBAR微质量传感器,使其Q值达到30.85,增加了近9倍,从而提升了纵波模式下FBAR微质量传感器对液体中微生物分子检测的性能。