摘要：A novel micromirror based on the PolyMUMPs process is designed and presented. The hexagonal micromirror with a diameter of 450 μm consists of three supporting bilayer cantilevers and a mirror plate. The bilayer cantilevers, formed with a polysilicon layer and a gold layer, elevate the mirror plate according to residual stress-induced bending. Both analytical and finite element analysis （FEA） models are built to calculate the elevated height of the free end of the cantilever. The analytical solution is in accordance with the FEA simulation results, with longitudinal stresses applied only. Results of a three-dimensional （3D） simulation with two direction stresses applied also show the elevated height to be proportional to the width of the cantilever and the length of the gold layer. Due to the torque of the joint, the elevated heights of the two kinds of cantilevers assembled with the mirror plates are much smaller than those of the free end of the cantilevers. Both micromirrors with different cantilevers are fabricated. The elevated heights of the fabricated micromirrors are measured using Veeco optical profiler, which show good coincidence with simulation results.

摘要：为了降低高速吹瓶机中凸轮机构带动的模具合模时出现的接触力,提出了基于机构动力学-控制系统协同仿真和优化的凸轮廓线优化设计方法。首先,建立吹瓶机模具运动控制系统模型,目标函数是在最大接触力约束下运动时间最短。其次,根据赫兹接触理论中接触力与变形量的关系,引入位移状态变量,将高速无冲击凸轮廓线设计问题转化为位移无超调的最速控制问题。通过机构动力学与控制系统协同仿真与优化,获得无超调约束下运动时间最短的控制系统参数和运动速度,并通过调整位移偏置量来实现接触力控制。最后,将最优运动曲线转化为凸轮曲线。仿真结果表明,新设计的凸轮曲线可以在更高速度时保持软着陆,有效降低了振动冲击,疲劳寿命达到1.4×107次。