摘要：A differential paired eFuse OTP(one-time programmable)memory cell which can be configured into a 2D(two-dimensional)eFuse cell array was *** sensible resistance of a programmed eFuse link is a half smaller than that of the single-ended counterpart and BL datum can be sensed without a reference *** this 2D array of differential paired eFuse OTP memory cells,we design a 32-bit eFuse OTP memory *** use a sense amplifier based D F/F circuit as the BL(bit-line)SA(sense amplifier)and design a sensing margin test circuit with a variable pull-up *** is confirmed by the function test that the designed 32-bit OTP memory IP functions normally on 30 sample dies.

摘要：随着显示技术的发展,Ti/Al/Ti材料需求的厚度越来越厚,布线越来越窄。目前LTPS显示技术中常规的设计为Ti/Al/Ti材料衬底使用无机膜,后续柔性OLED显示技术新设计中Ti/Al/Ti衬底开始逐渐使用有机膜(聚酰亚胺等),Ti/Al/Ti干法刻蚀工艺面临的挑战越来越大。本文主要研究在常规Ti/Al/Ti干法刻蚀工艺中,BCl 3气体对Ti/Al/Ti侧面形态的影响以及对光刻胶刻蚀速率的影响,实验结果表明:随着BCl 3气体流量的增加,Ti/Al/Ti侧面保护膜的厚度越来越薄,对PR胶的刻蚀速率越来越小。本文研究结果便于更好地应对后续Ti/Al/Ti干法刻蚀衬底为有机膜的新工艺。