摘要：Using Geant4 Monte Carlo code and Technology Computer-Aided Design(TCAD) simulation,energy deposition and charge collection of single event effects(SEE) are studied,which are induced by low-energy protons and α particles in small feature size *** analyzed charge collection of SEE especially at Bragg's peak and obtained two types of deposited energy distributions of protons and α particles at different incident *** two components of the total charge collected are quantified,which are due to drift current of the space charge region and current in the funnel region *** explain the high soft error rate in experiments of low energy proton.