摘要：Introducing basic design methodology for developing backstepping nonlinear controller for vibration control system. With a simplified second-order system model of nonlinear vibration system （Duffing＇s equation）, where, the process has illustrated the backstepping design step-by-step. Backstepping is a novel nonlinear design tool, which is based on constructing the Lyapunov function for the closed-loop systems and guarantees the stability and tracking performance through energy dissipation. In general, this nonlinear control design approach generates aggressive control effort to reduce the tracking error presented in this control system and significantly improve the system bandwidth. The effectiveness of the design scheme is shown through the computer simulation.

摘要：The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0-0.1Mpa. The resonant frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.