摘要：This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high *** fine stage is arranged in series with a coarse *** key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and *** designed the toggle mechanism for reduction of the displacement to suppress signal *** performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor,*** measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.