摘要：温度变化使得硅压阻式压力传感器产生零点漂移和灵敏度漂移,该漂移误差是硅压阻式压力传感误差的主要来源,也导致压阻式压力传感器上电后短时间出现上电热漂移现象,需要一定的预热时间。本文改进了实验测试平台的温控系统,提出了上电热漂移补偿算法,设计了一种具有快速上电响应能力的压阻式压力传感器,能够实现自动化的温度补偿。经测试,温度补偿后,压力传感器的示值误差在0~40℃的温度范围优于0.02%FS。找出了影响上电热漂移的关键因素,对上电后8~60 s满量程输出进行上电热漂补,将上电热漂移由0.012%FS减小到了0.0016%FS,提高了上电快速响应能力。

摘要：This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental *** the full temperature range from -40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin,the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.

摘要：This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory *** theoretical deductions are performed to identify a precise linear model of the open loop system of the sense mode,which is crucial for the PI controller *** frequency responses obtained by experimental tests agree well with those calculated with the theoretical model,indicating the accuracy of the theoretical *** results demonstrate that the bandwidth of the closed loop is extended to 94.8 Hz from 2.3 Hz in the open loop and the quadrature signal is suppressed by about 64 dBV in the closed loop *** overshoot and stable time in the step response of the closed loop system are measured to be about 15% and 35 ms,*** mode-splitting gyroscope with the closed loop controlled sense mode achieves a scale factor of 41.0 mV/deg/s with nonlinearity of 0.09% and asymmetry of 1%,and a bias instability of 4.0 °/h with angle random walk of 0.171 deg/h1/2.

摘要：基于先进航空发动机承力框架的结构与力学特征,通过理论分析与仿真计算验证了高隔振性承力框架结构动力学设计方法。通过对承力结构刚度/质量分布及几何构形突变的优化设计,提高转子支承结构在宽频域内的机械阻抗,实现在转子工作转速范围内的高隔振性。根据承力结构刚度/质量分布对隔振性的影响,采用折返式非连续结构,设计并搭建了转子-承力框架试验系统,通过试验进一步验证了高隔振性承力框架设计方法。试验结果表明:在承力结构中采用非连续性设计可在宽频域内对不同位置支点处激励具有良好的隔振效果。

摘要：高加速极限试验可快速暴露MEMS陀螺的缺陷和薄弱环节,针对复合环境应力试验的陀螺失效品,开展了详细的失效定位和机理分析,推导了引线的振动响应特性和固有模态,并提出了引线的抗振设计方法。仿真和实验结果表明,引线固有频率的理论推导模型比较精确,通过缩短引线长度可有效提高引线的固有频率和降低振动应力,从而增强其抗振能力。优化设计后陀螺可耐受频率为0~10 kHz、总均方根为30 gn的加速度随机振动。

摘要：为了深入掌握微机械陀螺的冲击响应特性,本文进行了详细的理论推导和MATLAB仿真分析,并进行了测试验证。冲击试验结果表明,理论分析和试验结果基本一致,考虑最坏情况可知,当脉宽对应的冲击频率与陀螺固有频率越接近,并且陀螺品质因子和冲击加速度幅值越大时,则冲击带来的影响就越大,梁越容易发生断裂失效。因此要使MEMS陀螺具有较强的抗冲击能力,必须综合优化设计陀螺的真空度和固有频率。

摘要：This paper experimentally studies the effects of the conductivity of a silicon wafer and the gap height between silicon structures and glass substrate on the footing effect for silicon on glass （SOG） structures in the deep reactive ion etching （DRIE） process. Experiments with gap heights of 5,20, and 50μm were carried out for performance comparison of the footing effect. Also,two kinds of silicon wafers with resistivity of 2-4 and 0.01-0. 0312Ω· cm were used for the exploration. The results show that structures with resistivity of 0.01 - 0. 0312Ω· cm have better topography than those with resistivity of 2-4Ω· cm; and structures with 50μm-high gaps between silicon structures and glass substrate suffer some- what less of a footing effect than those with 20μm-high gaps,and much less than those with Stem-high gaps. Our theoretical analysis indicates that either the higher conductivity of the silicon wafer or a larger gap height between silicon structures and glass substrate can suppress footing effects. The results can contribute to the choice of silicon type and optimum design for many microsensors.

摘要：大型地下式污水处理厂作为城市的重要基础设施,其地下箱体大、埋深大,相对于传统地上污水处理厂发生水涝的危害更大,也是相关专业设计的难点。通过对地下式污水处理厂的水涝危害、外部及内部原因进行分析;根据溢流原因、结合实际工程设计案例,在汛期雨水、进水闸井、重点溢流构筑物等方面采用有针对性的防涝设计,通过利用池体超高容积、细化各管廊层标高、调整污水泵及排涝泵的设置等方法,采用经济又高效的防涝技术措施,为大型地下式污水处理厂的防涝设计提供参考。

摘要：为解决泥水盾构施工中存在的碴土"滞排"问题,增强泥浆携碴排碴的能力,设计了一套泥浆携碴试验装置。该装置以泥浆性能参数对携碴能力的影响为研究目标,解决了泥浆环流携碴、携碴质量测量的问题。为验证试验装置的可行性,根据设计原理搭建了试验样机,开展了不同粘度流体的携碴试验。通过分析试验结果,明确了粘度对携碴性能的影响规律,总结了泥浆携碴能力的评价指标。利用此类装置进行泥浆携碴能力试验目前尚无同类资料作对比,但是多次试验结果具有较好的规律性和重复性,由此可以判断所试验装置的设计思路和结构是合理可行的。该装置有望在泥水盾构施工中为改进泥浆性能、减少"滞排"等方面发挥作用。

摘要：为探讨城市超大直径盾构隧道的围岩压力荷载特征,采用理论计算结合现场监测及数值模拟分析,针对春风路超大直径盾构隧道围岩荷载及管片受力特征开展研究。选取春风路隧道典型断面,进行全覆土理论计算值和实测围岩压力数据对比分析,通过现场监测得到管片结构、钢筋及螺栓的力学行为特征,并建立包含实际配筋的三维管片数值模型与实测值进行对比验证,得到以下结论:1)砂岩地层中土压力计测得的围岩压力,与全覆土理论不考虑水压的计算值较吻合;2)某断面偏载侧测点实测荷载相比计算值增加50%,围岩荷载的计算应考虑附加荷载的偏载效应进行局部放大;3)通过监测数据分析发现管片及钢筋的受力安全冗余度较高,均未超过设计强度值的40%;4)建模计算得到的结构受力数值与实测值较为吻合;5)在不考虑人为安装差异时,块间螺栓轴力分布较为均匀。