摘要：A compact multi-throttle aerostatic guideway is the preferred structure for high precision and acceleration motion in the variable-slit system(VS)of *** presence of microstructure,such as recesses and grooves,on the guideway working surface has been found to improve the loading ***,the effects on the guideway performance of changing the microstructure on the micron level are not yet *** mesh adaptation method,which was proposed by the authors,is employed in this paper to quantitatively study the influences of four microstructure *** effect of tuning these parameters on the loading performance is *** level of impact determines the proposed design process of the *** characteristic feature of the proposed design process is that the working points of carrying capacity,stiffness,and rotational stiffness are unified under twoway adjusting by means of recess *** to the proposed design process and tuning method,the restriction of supply pressure is lifted to a certain extent and the mutual tradeoff among the loading performances is *** experimental results show that the rotational stiffness of the designed guideway,based on the tuned parameters,reached 2.14×10^(4) Nmrad1 and increased by 69.8%.In a scanning test of the applied VS on argon fluoride laser(ArF)photolithography,the average scanning acceleration reached 67.5 m·s^(-2),meeting the design specification.

摘要：小型复合节流静压气体导轨是保证光刻机高速运动和精确定位的关键部件。为提升导轨的承载力及刚度,在工作面常增加浅腔和沟道等微结构,但微结构对导轨的力学特性、特别是转动刚度的影响一直不清晰。采用网络自适应方法研究了微结构的四个主要参数的影响,以此为依据归纳拟合出修正节流系数,建立了带有修正节流系数的导轨性能半解析模型,揭示了微结构参数微米量级变化对导轨性能的影响规律。以转动刚度最优、兼顾承载力和刚度为原则,归纳了各微结构参数的选取表达式,用于指导同类型静压气体导轨的设计。以光刻机可变狭缝系统为例,采用提出的修正节流系数及微结构选取方法对下层导轨进行设计。试验表明,转动刚度达到10.3×10^(3)N·m/rad,可以满足高速可变光阑加速扫描运动的需求,验证了方法的准确有效性。