摘要：A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.

摘要：对基于SU-8紫外负性光刻胶的无源-有源集成式电光开关进行了系统的研究。首先用物理掺杂的方法制备出价格低廉、性能良好的主客掺杂型电光材料DR1/SU-8,反射法测量其电光系数约为11.5pm/V@1 310nm。为减小器件的插入损耗,设计了有源芯层为DR1/SU-8、无源芯层为SU-8的倒脊形混合集成式波导结构。制作完CPW行波电极后,对器件进行接触极化。实验测得开关的上升时间和下降时间分别为5.6μs和5.2μs,插入损耗为13.8dB,与只用DR1/SU-8作为波导芯层的器件相比,插入损耗减小了约2.8dB。实验结果表明,这种无源-有源集成式电光波导有效地减小了器件的插入损耗,为制备低损耗的电光器件和单片多功能集成器件奠定了一定的基础。