摘要：A digital accelerometer is developed by using a ring oscillator(RO)and a *** sensitive unit of the accelerometer is the metal-oxide semiconductor(MOS)ROs located on silicon *** on the piezoresistive effect of the MOS RO,the accelerometer transduces the acceleration into frequency *** syntonic frequency of the MOS RO changes in relation to many environmental elements,such as temperature,source voltage,and so *** mixer is an interior signal processor that improves the output signal characteristics,with the digital output signal representing the frequency *** the accelerometer is based on the piezoresistive effect of the MOS RO,the frequency characteristics of the MOS RO and its relationship with the acceleration are *** device has been fabricated using standard integrated circuits processing methods combined with the Micro-Electro-Mechanical Systems *** characteristics of the sample chip are in agreement with the theoretical *** accelerometer has a high sensitivity of 6.91 kHz/g,a low temperature coefficient,and a simple fabrication process.