摘要：A Terahertz sensing method based on the resonant transmission characteristics through metallic aperture arrays is proposed. Here we present metallic aperture arrays of rectangular and H-shaped holes which induce localized resonance. High characterization sensitivity to surface condition is demonstrated. When applied with the liquid of 3-pentanone, arrays of rectangular and H-shaped holes have sensitivity of 158 and 172 GHz/RIU （refractive index unit）, respectively. So the metal meshes based localized resonance can also be used as a sensor chip in terahertz region.