摘要：The Knudsen effusion cell is often used to grow high-quality Cu(In,Ga)Se_(2)(CIGS)thin film in coevaporation ***,the traditional single-heating Knudsen effusion cell cannot deliver complete metal selenides during the whole deposition process,particularly for a low-temperature deposition process,which is probably due to the condensation and droplet ejection at the nozzle of the *** this study,thermodynamics analysis is conducted to decipher the reason for this ***,a new single-heating Knudsen effusion is proposed to solve this difficult problem,which leads to an improvement in the quality of CIGS film and a relative increase in conversion efficiency of 29%at a growth rate of about 230 nm
min1,compared with the traditional efficiency in a lowtemperature rapid-deposition process.