摘要：本文提出了一种利用静电弹簧软化效应提高加速度计灵敏度的方法。加速度计采用4组U型弹簧对敏感质量进行支撑,敏感质量上设计了差分电容检测结构和静电调谐结构。实现了结构谐振频率可调,保证了加速度计的结构强度,提高了传感器灵敏度。建立了加速度计的数学结构模型。通过仿真,对加速度计进行模态分析,研究了调谐电压对灵敏度的影响。结果表明:当调谐电压增大到30 V时,加速度计的位移灵敏度增加了34%,电容灵敏度增加了39.7%,谐振频率降低了13.4%。最后利用实验进行谐响应分析,发现加速度计的谐振频率降低了17.5%,验证了变刚度方案的可行性。

摘要：压力传感器广泛应用在工业自动化、汽车电子、医疗设备和消费电子等领域,在汽车中的发动机、空调和TPMS(汽车轮胎压力监测系统)等零部件大量应用。标定过程是压力传感器关键工艺,标定过程中的保压和温控是该工艺的关键控制特性,为了确保传感器完全达到设定温度,标定过程需要很长的温度稳定时间,也需要高精度的温度和压力控制,为生产带来较大的困难,生产节拍难以提高,产量受到制约。新开发的压力传感器标定算法,将有效减少高精度压力和温度控制设备,避免昂贵设备投资,并且降低生产时间,提高生产率。文章以TPMS为例,介绍新标定设计方案,其他压力检测产品也可以借鉴。

摘要：为了提高差压传感器的双向过载能力,本文设计了一种梁-群岛错位膜结构差压敏感元件。该敏感元件由梁-群岛硅膜结构和玻璃基底键合而成。其中,梁结构降低了应力集中,群岛结构提高了结构刚度;玻璃基底键合面设计有方形凹槽和圆形通孔,硅膜结构和玻璃基底的方形凹槽形成的错位结构进一步降低了最大应力。首先,通过有限元软件分析了双向高过载硅基差压敏感元件的应力分布、敏感元件的满量程输出及最大应力。其次,分析了结构尺寸与爆破压力的关系,采用尺寸优化求解出最大爆破压力下的结构尺寸。最后,通过mems硅工艺制作了具有双向高过载的硅基差压敏感元件。压力测试结果表明:制得的双向高过载硅基差压敏感元件的爆破压力为8.5倍量程,与传统C型膜结构差压敏感元件(爆破压力6.5倍量程)相比,过载能力提高了30.7%。实验结果证明梁-群岛错位膜结构可以有效提高差压敏感元件的双向过载能力。

摘要：This paper presents the design and fabrication of a Lamb wave device based on ZnO piezoelectric film. The Lamb waves were respectively launched and received by both Al interdigital *** order to reduce the stress of the thin membrane,the ZnO/Al/LTO/Si;N;/Si multilayered thin plate was designed and fabricated.A novel method to obtain the piezoelectric constant of the ZnO film was *** experimental results for characterizing the wave propagation modes and their frequencies of the Lamb wave device indicated that the measured center frequency of antisymmetric A;and symmetric S;modes Lamb wave agree with the theoretical *** mass sensitivity of the mems Lamb wave device was also characterized for gravimetric sensing application.

摘要：A kind of piezoresistive ultrasonic sensor based on mems is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the *** the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation *** boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic *** membrane-beam microstructure is fabricated integrally by mems manufacturing ***,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated *** sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.

摘要：This work presents our understanding of insect wings, and the design and micromachining of artificial wings with golden ratio-based and tapered veins. The geometric anisotwpy of Leading Edge Veins （LEVs） selected by Diptera has a function able to evade impact. As a Diptera example, the elliptic hollow-LEVs of cranefly wings are mechanically and aerodynamically significant. In this paper, an artificial wing was designed to be a fractal structure by mimicking cranefly wings and incorporating cross-veins and discal cell. Standard technologies of Microelectromechanical Systems （mems） were employed to materialize the design using the selected material. One SU-8 wing sample, light and stiffenough to be comparable to fresh cranefly wings, was presented. The as-prepared SU-8 wings are faithful to real wings not only in weight and vein pattern, but also in flexural stiffness and mass distribution. Thus our method renders possible mimickine with good lidelity of natural wings with complex geometry and morphology.

摘要：A terminating type mems microwave power sensor based on the Seebeck effect and compatible with the GaAs MMIC process is presented. An electrothermal model is introduced to simulate the heat transfer behavior and temperature distribution. The sensor measured the microwave power from –20 to 20 dBm up to 20 GHz. The sensitivity of the sensor is 0.27 mV/mW at 20 GHz, and the input return loss is less than –26 dB over the entire experiment frequency range. In order to improve the sensitivity, four different types of coplanar waveguide （CPW） were designed and the sensitivity was significantly increased by about a factor of 2.

摘要：针对mems设计的特点,在研究其设计过程和规律的基础上,提出一种mems集成化设计方法,该设计方法从方法论的角度探究了mems的最优设计问题.在集成化设计方法的基础上,研究mems工艺版图的三维重构和面向系统级仿真的宏模型构建方法,实现了mems集成化设计环境,有助于建立支持集成化设计的mems CAD软件系统.

摘要：传统的压阻式压力传感器虽然灵敏度高但非线性度也高。针对该问题,设计了一种以敏感膜片为梁−膜−三岛结构的新型压阻式压力传感器,通过在敏感膜片上设计3个方岛结构来提高传感器的线性度和抗过载能力;同时,利用敏感膜片上设计的短窄梁结构形成应力集中区,保证压力传感器的高灵敏度。对结构进行仿真分析,建立压力膜尺寸参数与力学性能之间的数学模型,对数学模型参数进行了分析、拟合和求解,最后求解非线性约束条件下的极值,完成尺寸优化,传感器性能得到提升。结果表明:在保证传感器低非线性度的条件下,提高了压力传感器的灵敏度,具有良好的力学性能。

摘要：现有微机电系统设计中所存在的一个重要问题是,设计人员需要通过工艺和版图设计来完成几何设计,因此难以用于复杂器件的设计。研究了表面微加工mems几何模型到工艺层模型的自动转化,旨在实现mems器件几何设计和工艺规划的分离,给出了表面微机械加工的工艺特征的定义和分类方法,并简要介绍了工艺特征的自动识别过程,重点研究了基于工艺特征模型的工艺层模型自动生成方法。最后给出了试验结果。