摘要：Micro-mass sensors have attracted increasing attention in the field of biomolecular and chemical detec- tion. It has been found that the size, shape, and geometry of the structure may affect the performance of the sensor. As a result, a topology optimization methodology is proposed in this paper for the design of micro-mass sensors. A phase- field function controlled by nodal variables and finite element shape functions is used to describe the configuration of a sen- sor in the constructed optimization problem. The design goal is to maximize the mass detection sensitivity. On the basis of these formulations, an optimization algorithm is constructed using the finite element method and the method of moving asymptotes. Numerical examples are presented to demon- strate the validity of the proposed problem formulation. The results suggest that the performance of the micro-mass sensor can be improved by using the proposed approach.