摘要：As a key component of electro-optical systems, a Two-axis Scan mirror AssemblY(TSAY) is usually used for Line-of-Sight(LOS) precision pointing, tracking, scanning, and stabilizing. Therefore, it is necessary for a TSAY to have a large angular range, high dynamic characteristics, and small mirror surface distortion. Furthermore, vibration from carriers of electro-optical systems, such as spacecraft and airplanes, is inevitable, so it is critical to guarantee the control accuracy of a TSAY under vibration. In this paper, a TSAY prototype is designed and developed. To increase the control bandwidth, structural topology optimization is applied to the TSAY’s elliptical mirror to reduce the moment of inertia, meanwhile keeping surface flatness. A flexible hinge is adopted to achieve a large angular range. To suppress the angular perturbation caused by the base linear vibration, an adaptive feedforward loop with base-integrated micro-electro-mechanical System(MEMS) accelerators is constructed to enhance the TSAY’s feedback loop. Simulation and experimental results show that the TSAY prototype’s two-axis mechanical angular ranges are more than ±3.2°, the mirror surface flatness Root Mean Square(RMS) value is better than 0.04 k, and the closed-loop bandwidth is beyond 330 Hz. These are suitable for most applications. Besides, the angular perturbation caused by the base vibration can be suppressed more than 37.7% with the addition of the adaptive feedforward loop.

摘要：利用MEMS(micro-electro-mechanical system)体积小、质量轻、集成度高等特点,将该技术用于航空发动机,可以更好地实现对发动机的流动、燃烧过程进行主动控制、对关键结构部件的损伤以及滑油系统健康状态进行监测等方面的功能,进而实现航空发动机的智能化.为了实现MEMS在航空发动机上的应用,一方面是提高MEMS自身适应航空发动机环境的能力;另外一方面则需要开展其和航空发动机的兼容性设计及研究.随着MEMS技术的不断发展,它必将是推动航空发动机发展的一个重要新技术.