摘要：One of the core semiconductor devices is the electrostatic chuck. It has been widely used in plasma- based and vacuum-based semiconductor processing. The electrostatic chuck plays an important role in adsorbing and cooling/heating wafers, and has technical advantages on non-edge exclusion, high reliability, wafer planarity, particles reduction and so on. This article extracts key design elements from the existing knowledge and techniques of electrostatic chuck by the method proposed by Paul and Beitz, and establishes a design space systematically. The design space is composed of working objects, working principles and working structures. The working objects in- volve electrostatic chuck components and materials, classifications, and relevant properties; the working principles involve clamping force, residual force, and temperature control; the working structures describe how to compose an electrostatic chuck and to fulfill the overall functions. The systematic design space exhibits the main issues during electrostatic chuck design. The design space will facilitate and inspire designers to improve the design quality and shorten the design time in the conceptual design.

摘要：The abstraction of complex biological lightweight structure features into a producible technical component is a funda- mental step within the transfer of design principles from nature to technical lightweight solutions. A major obstacle for the transfer of natural lightweight structures to technical solutions is their peculiar geometry. Since natural lightweight structures possess irregularities and often have extremely complex forms due to elaborate growth processes, it is usually necessary to simplify their design principles. This step of simplification/abstraction has been used in different biomimetic methods, but so far, it has an arbitrary component, i.e. it crucially depends on the competence of the person who executes the abstraction. This paper describes a new method for abstraction and specialization of natural micro structures for technical lightweight compo- nents. The new method generates stable lightweight design principles by using topology optimization within a design space of preselected biological archetypes such as diatoms or radiolarian. The resulting solutions are adapted to the technical load cases and production processes, can be created in a large variety, and may be further optimized e.g. by using parametric optimization.

摘要：The technologies of software architecture are introduced, and the software analysis-and-design process is divided into requirement analysis, software architecture design and system design. Using these technologies, a model of architecture-centric software analysis and design process（ACSADP） is proposed. Meanwhile, with regard to the completeness, consistency and correctness between the software requirements and design results, the theories of function and process control are applied to ACSADP. Finally, a model of integrated development environnment （IDE） for ACSADP is propcsed. It can be demonstrated by the practice that the model of ACSADP can aid developer to manage software process effectively and improve the quality of software analysis and design.

摘要：This paper addresses geometry design of a new kind of 2-DOF parallel manipulator actuated horizontally by linear actua- tors. The first step of the optimum design involves developing a non-dimensional structure of the planar 2-DOF parallel manipulator. The global conditioning index, global velocity index, global stiffness index and global payload index of the 2-DOF parallel manipu- lators are investigated, and the geometrical parameters without dimension are determined with respect to the specification on per- formances. Finally, based on the optimum non-dimensional result, the optimum dimensional parameters are achieved which is suit- able for the desired workspace. The optimum methodology of this paper is convenient and can be extended to other parallel mecha-