摘要：flexure mechanisms with decoupled characteristics have been widely utilized in precision positioning ***,these mechanisms suffer from either slow response or low load ***,asymmetric design always leads to thermal *** order to solve these issues,a novel 2-DOF decoupled mechanism is developed by monolithically manufacturing sets of statically indeterminate symmetric（SIS） flexure structures in *** design helps to eliminate the thermal error and Finite Element Analysis（FEA） results show that the maximum coupling ratio between X and Y axes is below 0.25% when a maximum pretension force of 200 N is *** ignoring the mass effect,all the SIS flexure structures are simplified to ＂spring-damper＂ components,from which the static and dynamics model are *** relation between the first resonant frequency of the mechanism and the load is investigated by incorporating the load mass into the proposed dynamics *** results show that even with a load of 0.5 kg,the first resonant frequency is still higher than 300 Hz,indicating a high load *** mechanism＇s static and dynamic performances are experimentally *** linear stiffnesses of the mechanism at the working platform and at the driving point are measured to be 3.563 0 N·μm-1 and 3.362 1 N·μm-1,*** corresponding estimation values from analytical models are 3.405 7 N·μm-1 and 3.381 7 N·μm-1,which correspond to estimation errors of-4.41% and 0.6%,*** an additional load of 0.16 kg,the measured and estimated first resonant frequencies are 362 Hz and 365 Hz,*** estimation error is only 0.55%.The analytical and experimental results show that the developed mechanism has good performances in both decoupling ability and load capability;its static and dynamic performance can be precisely estimated from corresponding analytical *** proposed mechanism has wide potentials in precision positioning applic

摘要：The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.