摘要：The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are *** consistency of the resonance frequency and the sensitivity of the array are ***,we detect the directivity and the multi-target identification ability of the *** results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical *** paper analyzes this problem in detail and points out the direction of *** for the directivity,the actual result is consistent with the theoretical *** results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72°when the distance between the sensor array and measured objects is 2 m.

摘要：A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the *** the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation *** boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic *** membrane-beam microstructure is fabricated integrally by MEMS manufacturing ***,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated *** sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.

摘要：With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil *** with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis *** ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are *** dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.