摘要：With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil *** with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis *** ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are *** dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.