摘要：A DC to 5GHz series MEMS switch is designed and fabricated for wireless communication applications,and thermal effect and power handling of the series switch are *** switch is made on glass substrate,and gold platinum contact is used to get a stable and little insert *** DC to 5GHz,0 6dB insertion loss,30dB isolation,and 30μs delay are *** effect of the switch is tested in 85℃ and -55℃ atmosphere *** DC to 4GHz,the insert loss of the switch increases 0 2dB in 85℃ and 0 4dB in -55℃,while the isolation holds the same value as that in room *** measure the power handling capability of the switch,we applied a continuous RF power increasing from 10dBm to 35 1dBm with the step of 1 0dBm across the switch at *** switch keeps working and shows a decrease of the insert loss for 0 1～0 *** maximum continuous power handling (35 1dBm,about 3 24W) is higer than the reported value of shunt switch (about 420mW),which implies series switches have much better power handling capability.